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Applying slope constrained Q-type aspheres to develop higher performance lenses.

Bin Ma1, Lin Li, Kevin P Thompson

  • 1The Institute of Optics, University of Rochester, 275 Hutchinson Road, Rochester, New York 14627, USA. binma@optics.rochester.edu

Optics Express
|November 24, 2011
PubMed
Summary
This summary is machine-generated.

A new Q-type aspheric description improves lens design by allowing direct slope constraints. This results in more testable and robust optical systems, reducing sensitivity to assembly errors for high-NA lithographic lenses.

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Area of Science:

  • Optical engineering
  • Lithography optics

Background:

  • Standard power series descriptions for aspheric surfaces in high NA lithographic lenses require high precision.
  • This precision exceeds typical double-precision computing capabilities.

Purpose of the Study:

  • Introduce the Q-type aspheric description to address precision limitations.
  • Investigate the benefits of slope constraints during optimization using Q-type surfaces.

Main Methods:

  • Developed and applied the Q-type aspheric surface description.
  • Optimized aspheric surfaces with direct slope constraints.

Main Results:

  • Q-type aspheric surfaces enable direct slope constraint during optimization.
  • Optimized surfaces are more testable.
  • Solutions show reduced sensitivity to assembly misalignments (e.g., tilt and decenter) by over 3X for a NA 0.75 lens.

Conclusions:

  • The Q-type aspheric description offers a practical solution for high-precision lens design.
  • Incorporating slope constraints enhances optical system robustness and performance in real-world applications.