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Updated: May 27, 2026
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Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
Two-dimensional free-space beam steering with an optical phased array on silicon-on-insulator
J K Doylend1, M J R Heck, J T Bovington
1Dept. of Electrical and Computer Engineering, University of California, Santa Barbara, California 93106, USA. doylend@ece.ucsb.edu
Optics Express
|November 24, 2011
Summary
This study presents a 16-channel silicon optical phased array for 2D beam steering. It achieves a wide field of view and significant background suppression for optical applications.
Area of Science:
- Photonics and Optical Engineering
- Integrated Optics
- Semiconductor Devices
Background:
- Optical beam steering is crucial for applications like free-space optical communication and LiDAR.
- Existing methods often face limitations in field of view, speed, or integration.
Purpose of the Study:
- To demonstrate a novel silicon-based optical phased array for two-dimensional beam steering.
- To characterize the performance of a 16-channel independently tuned waveguide surface grating optical phased array.
Main Methods:
- Fabrication of a 16-channel waveguide surface grating optical phased array in silicon.
- Independent tuning of each channel for precise beam control.
- Characterization of the device's field of view, beam width, and background suppression.
Main Results:
- Achieved two-dimensional beam steering with a total field of view of 20° x 14°.
- Demonstrated a narrow beam width of 0.6° x 1.6°.
- Obtained full-window background peak suppression of 10 dB.
Conclusions:
- The developed silicon optical phased array offers efficient and precise 2D beam steering capabilities.
- This technology is promising for advanced photonic systems requiring agile optical control.
