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Updated: May 26, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

Published on: July 5, 2016

Study on a two-dimensional scanning micro-mirror and its application in a MOEMS target detector.

Chi Zhang¹, Zheng You, Hu Huang

¹State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084, China. c-z04@mails.tsinghua.edu.cn

Sensors (Basel, Switzerland)

|December 14, 2011

Summary

A novel two-dimensional scanning micro-mirror enables a compact Micro-Opto-Electro-Mechanical Systems (MOEMS) target detector. This system precisely measures target range and orientation using phase-shift ranging technology.

Keywords:

MOEMS laser ranging piezoresistor scanning mirror target detection

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Area of Science:

Optoelectronics and MEMS (Micro-Electro-Mechanical Systems)

Background:

Conventional scanning detectors limit the performance of target detection systems.
Micro-mirror technology offers a pathway to miniaturized and advanced optical sensing solutions.

Purpose of the Study:

To develop a novel two-dimensional scanning micro-mirror for enhanced target detection and measurement.
To integrate this micro-mirror into a compact MOEMS target detector, replacing traditional scanning methods.

Main Methods:

Fabrication of a micro-mirror using MEMS processes, actuated by a piezoelectric actuator.
Excitation of the micro-mirror in resonance modes to achieve large deflection angles for 2D scanning.
Integration of piezoresistors for precise, independent measurement of deflection angles in both directions.
Development of a MOEMS target detector utilizing the scanning micro-mirror and phase-shift ranging technology.

Main Results:

Successful development of a compact MOEMS target detector (90 mm × 35 mm × 50 mm).
Demonstrated detection of targets within the scanning field and measurement of relative range and orientation.
Achieved measurement resolutions of 10.2 cm for range, 0.15° for horizontal orientation, and 0.22° for vertical orientation up to 3 m with a 20° × 20° field of view.

Conclusions:

The developed scanning micro-mirror is effective for 2D scanning in MOEMS target detectors.
The integrated MOEMS target detector provides precise range and orientation measurements for targets.
This technology offers a significant advancement in compact target detection and measurement systems.