Combined simulation of a micro permanent magnetic linear contactless displacement sensor

Jing Gao1, Wolfgang F O Müller, Felix Greiner

  • 1Graduate School Computational Engineering, TU Darmstadt, Dolivostraße 15, D-64293 Darmstadt Germany. gao@gsc.tu-darmstadt.de

Summary

A novel micro-permanent magnetic linear contactless displacement (PLCD) sensor for MEMS measurements was designed and simulated. This study analyzes key parameters influencing the performance of this advanced magnetic inductive sensor.

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