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Preparation of Silicon Nanowire Field-effect Transistor for Chemical and Biosensing Applications
Published on: April 21, 2016
Characteristics of polysilicon wire glucose sensors with a surface modified by silica nanoparticles/γ-APTES
Jing-Jenn Lin1, Po-Yen Hsu, You-Lin Wu
1Department of Applied Materials and Optoelectronic Engineering, National Chi Nan University, Puli, Nantou 54561, Taiwan. cclin@ncnu.edu.tw
Abstract:
This report investigates the sensing characteristics of polysilicon wire (PSW) glucose biosensors, including thickness characteristics and line-width effects on detection limits, linear range and interference immunity with membranes coated by micropipette/spin-coating and focus-ion-beam (FIB) processed capillary atomic-force-microscopy (C-AFM) tip scan/coating methods. The PSW surface was modified with a mixture of 3-aminopropyl-triethoxysilane (γ-APTES) and polydimethylsiloxane (PDMS)-treated hydrophobic fumed silica nanoparticles (NPs). We found that the thickness of the γ-APTES+NPs nonocomposite could be controlled well at about 22 nm with small relative standard deviation (RSD) with repeated C-AFM tip scan/coatings. The detection limit increased and linear range decreased with the line width of the PSW through the tip-coating process. Interestingly, the interference immunity ability improves as the line width increases. For a 500 nm-wide PSW, the percentage changes of the channel current density changes (ΔJ) caused by acetaminophen (AP) can be kept below 3.5% at an ultra-high AP-to-glucose concentration ratio of 600:1. Simulation results showed that the line width dependence of interference immunity was strongly correlated with the channel electrical field of the PSW biosensor.

