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Related Experiment Video

Updated: May 26, 2026

Aerosol-assisted Chemical Vapor Deposition of Metal Oxide Structures: Zinc Oxide Rods

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Published on: September 14, 2017

SnO2/Pt thin film laser ablated gas sensor array.

Mohammad Hadi Shahrokh Abadi¹, Mohd Nizar Hamidon, Abdul Halim Shaari

¹Electrical and Electronic Department, Engineering Faculty, Universiti Putra Malaysia 43400, Serdang, Selangor, Malaysia. mhshahrokh@gmail.com

Sensors (Basel, Switzerland)

|December 14, 2011

Summary

This summary is machine-generated.

A novel gas sensor array was created using screen printing and Pulse Laser Ablation Deposition (PLAD). This tin oxide and platinum-based sensor shows promise for detecting solvents and wood smoke with rapid response times.

Keywords:

gas sensor platinum pulse laser ablation deposition screen printing thin film tin oxide

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Area of Science:

Materials Science
Chemical Engineering
Sensor Technology

Background:

Development of miniaturized gas sensor arrays is crucial for environmental monitoring and industrial safety.
Screen printing and Pulse Laser Ablation Deposition (PLAD) are advanced fabrication techniques with potential for micro-device manufacturing.

Purpose of the Study:

To fabricate a compact gas sensor array using a combination of screen printing and PLAD.
To investigate the sensing capabilities of tin oxide and platinum films for detecting specific analytes.
To characterize the structural and morphological properties of the deposited films.

Main Methods:

Fabrication of heater, electrode, and insulator layers via screen printing on an alumina substrate.
Deposition of tin oxide (sensing layer) and platinum (catalyst layer) films using PLAD with a Nd-YAG laser.
Characterization of film properties using Scanning Electron Microscopy (SEM), Energy Dispersive X-ray spectroscopy (EDX), X-ray Diffraction (XRD), and Atomic Force Microscopy (AFM).

Main Results:

Successful fabrication of a 10 × 10 mm(2) gas sensor array.
Characterization confirmed the surface morphology, structure, and composition of the tin oxide and platinum films.
The sensor array demonstrated sensitivity to certain solvents and wood smoke.

Conclusions:

The integrated screen printing and PLAD approach is effective for fabricating miniaturized gas sensor arrays.
The developed tin oxide and platinum-based sensor exhibits potential for detecting volatile organic compounds and combustion products.
The sensor's fast response and recovery times indicate its suitability for real-time monitoring applications.