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Daisuke Barada1, Tomohiro Kiire, Jun-ichiro Sugisaka

  • 1Graduate School of Engineering, Utsunomiya University, 7-1-2 Yoto, Utsunomiya, Tochigi 321-8585, Japan. barada@cc.utsunomiya‐u.ac.jp

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This study introduces a novel image sensor technique to measure object surface shapes using two wavelengths. The Doppler phase-shifting method accurately extracts complex amplitudes for precise optical measurements.

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Area of Science:

  • Optical Metrology
  • Wavefront Sensing
  • Diffraction Optics

Background:

  • Accurate surface shape measurement is crucial in optics and engineering.
  • Existing methods may face limitations in speed or precision.
  • Characterizing diffracted beams at multiple wavelengths is complex.

Purpose of the Study:

  • To present a new method for obtaining complex amplitudes of diffracted beams at two wavelengths.
  • To utilize an image sensor for efficient optical data acquisition.
  • To experimentally validate the proposed technique for surface metrology.

Main Methods:

  • Employing an image sensor to capture diffracted light patterns.
  • Applying the Doppler phase-shifting method for complex amplitude extraction.
  • Using two lasers with different wavelengths for dual-color measurements.

Main Results:

  • Successfully obtained complex amplitudes of diffracted beams at two distinct wavelengths.
  • Demonstrated the capability to measure the surface shape of a concave mirror.
  • Experimental verification confirmed the principle's efficacy.

Conclusions:

  • The proposed image sensor-based method enables accurate complex amplitude retrieval at multiple wavelengths.
  • This technique offers a viable approach for precise surface shape metrology.
  • The Doppler phase-shifting method is effective for dual-wavelength optical measurements.