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Updated: May 26, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Yongjun Lim1, Joonku Hahn, Byoungho Lee
1National Creative Research Center for Active Plasmonics Application Systems, Inter-University Semiconductor Research Center and School of Electrical Engineering, Seoul National University, Gwanak-Gu Gwanakro 1, Seoul 151-744, South Korea.
Phase-conjugate holographic lithography uses digital micromirror devices (DMDs) and telecentric lenses to create patterns. This advanced technique offers an extended focus range, ideal for patterning uneven surfaces with high resolution.
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