Dissociative electron attachment to Pt(PF3)4--a precursor for focused electron beam induced processing (FEBIP)

Olivier May1, Dušan Kubala, Michael Allan

  • 1Department of Chemistry, University of Fribourg, Chemin du Musée 9, 1700 Fribourg, Switzerland.

Summary

Dissociative electron attachment to platinum hexafluorophosphate reveals dominant single ligand loss. This study details fragment anion formation and resonance assignments, impacting focused electron beam induced deposition (FEBIP).

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