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Updated: May 26, 2026

Photoelectron Imaging of Anions Illustrated by 310 Nm Detachment of F−
Published on: July 27, 2018
Dissociative electron attachment to Pt(PF3)4--a precursor for focused electron beam induced processing (FEBIP)
Olivier May1, Dušan Kubala, Michael Allan
1Department of Chemistry, University of Fribourg, Chemin du Musée 9, 1700 Fribourg, Switzerland.
Dissociative electron attachment to platinum hexafluorophosphate reveals dominant single ligand loss. This study details fragment anion formation and resonance assignments, impacting focused electron beam induced deposition (FEBIP).
Area of Science:
- Physical Chemistry
- Surface Science
- Materials Science
Background:
- Dissociative electron attachment (DEA) is crucial for understanding electron-molecule interactions.
- Platinum-containing precursors are vital in focused electron beam induced deposition (FEBIP).
Purpose of the Study:
- To experimentally determine absolute cross sections for DEA to Pt(PF3)4.
- To identify fragment anions and characterize the resonances responsible for DEA.
- To discuss the implications for FEBIP applications.
Main Methods:
- Experimental measurement of absolute cross sections for dissociative electron attachment.
- Analysis of fragment anions formed.
- Comparison with electron energy-loss and vibrational excitation spectra.
Main Results:
- Dominant DEA pathway is the loss of a single PF3 ligand with a large cross section (20,000 pm^2).
- Formation of various fragment anions, including Pt(PF3)F- and F-.
- Identification of shape resonances around 0.5 eV and 2 eV, and core-excited resonances at 5.9 eV and 12.1 eV.
Conclusions:
- The DEA process in Pt(PF3)4 is primarily driven by single ligand loss.
- Resonance assignments provide insights into electron interactions with the molecule.
- Findings contribute to the understanding of precursor behavior in FEBIP.
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