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Updated: Dec 29, 2025

Aerosol-assisted Chemical Vapor Deposition of Metal Oxide Structures: Zinc Oxide Rods
Published on: September 14, 2017
Thermal behavior of MOCVD-grown Cu-clusters on ZnO(1010)
Martin Kroll1, Thomas Löber, Vadim Schott
1Institut für Experimentalphysik IV/AG Oberflächenphysik, Ruhr-Universität Bochum, 44780 Bochum, Germany. martin.kroll@rub.de
Abstract:
Scanning tunnelling microscopy (STM) and X-ray photoelectron spectroscopy (XPS, AES) were used to study MOCVD of Cu-clusters on the mixed terminated ZnO(1010) surface in comparison to MBE Cu-deposition. Both deposition methods result in the same Cu cluster morphology. After annealing to 670 K the amount of Cu visible above the oxide surface is found to decrease substantially, indicating a substantial diffusion of Cu atoms inside the ZnO-bulk. The spectroscopic data do not show any evidence for changes in the Cu oxidation state during thermal treatment up to 770 K.
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