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Updated: May 26, 2026

Soft Lithographic Functionalization and Patterning Oxide-free Silicon and Germanium
Published on: December 16, 2011
Bradley W Biggs1, Heather K Hunt, Andrea M Armani
1Mork Family Department of Chemical Engineering and Materials Science, University of Southern California, Los Angeles, CA 90089, USA.
Researchers found that xenon difluoride etching selectively prevents silane coupling on silicon wafer surfaces. This discovery simplifies surface functionalization for ultra-sensitive, label-free biosensors used in medical diagnostics.
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