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Effect of sample tilt on PEEM resolution.

Martin Oral1, Tomáš Radlička, Bohumila Lencová

  • 1Institute of Scientific Instruments AS CR, Královopolská 147, 61264 Brno, Czech Republic. oral@isibrno.cz

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Small sample tilts in electron microscopy create parasitic fields, significantly reducing resolution. Our simulations show these imperfections, even when corrected, degrade image quality, particularly in the direction of the dipole field.

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Area of Science:

  • Electron Microscopy
  • Computational Physics
  • Optical Systems

Background:

  • Electron microscopy systems typically assume perfect alignment or rely on multipole correctors to fix minor imperfections.
  • In photoemission electron microscopes, imperfections in the cathode lens between the sample and objective lens can severely impact resolution.
  • A small sample tilt can generate a parasitic dipole field due to the strong lens field, degrading resolution and causing image distortions.

Purpose of the Study:

  • To simulate the impact of small sample tilts on electron microscopy system resolution.
  • To analyze how parasitic dipole fields affect resolution and image quality.
  • To investigate the effectiveness of standard correctors in mitigating these effects.

Main Methods:

  • Utilized modern computational methods to simulate the entire electron microscopy system, including parasitic fields.
  • Incorporated the proper setting of centering deflectors and stigmators into the simulation.
  • Determined system resolution by simulating the point spread function and analyzing its significant portion.

Main Results:

  • A small sample tilt was found to generate a parasitic dipole field, significantly impairing resolution.
  • Even with the use of centering deflectors and stigmators, resolution degradation was observed.
  • The primary direction of resolution worsening was found to be aligned with the parasitic dipole field.

Conclusions:

  • Sample tilt is a critical factor that can significantly degrade electron microscopy resolution, especially in systems with strong fields like cathode lenses.
  • Standard multipole correctors may not fully compensate for the resolution loss caused by parasitic fields from sample tilt.
  • Accurate simulation of parasitic fields is essential for understanding and mitigating resolution loss in advanced electron microscopy designs.