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Updated: May 26, 2026

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
P Scott Carney1, Bradley Deutsch, Alexander A Govyadinov
1Department Electrical and Computer Engineering and The Beckman Institute for Advanced Science and Technology, University of Illinois, Urbana, Illinois 61801, USA. carney@uiuc.edu
Researchers developed a new quantitative phase measurement method for nanooptics. This technique offers insights beyond traditional amplitude measurements, advancing imaging and microscopy applications.
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