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Updated: May 26, 2026
Fabrication of 3D Carbon Microelectromechanical Systems (C-MEMS)
Published on: June 17, 2017
Increased graphitization in electrospun single suspended carbon nanowires integrated with carbon-MEMS and carbon-NEMS
Swati Sharma1, Ashutosh Sharma, Yoon-Kyoung Cho
1School of Nano-Bioscience and Chemical Engineering, Ulsan National Institute of Science and Technology, Ulsan 689-798, South Korea.
Abstract:
Single suspended carbon nanowires (CNWs) integrated on carbon-MEMS (CMEMS) structures are fabricated by electrospinning of SU-8 photoresist followed by pyrolysis. These monolithic CNW-CMEMS structures enable fabrication of very high aspect ratio CNWs of predefined length. The CNWs thus fabricated display core-shell structures having a graphitic shell with a glassy carbon core. The electrical conductivity of these CNWs is increased by about 100% compared to glassy carbon as a result of enhanced graphitization. We suggest some tunable fabrication and pyrolysis parameters that may improve graphitization in the resulting CNWs, making them a good replacement for several carbon nanostructure-based devices.
