[Diagnostics of atmospheric-pressure radio-frequency capacitively coupled Ar/N2 plasma by optical emission...

An atmospheric-pressure Ar/N2 glow discharge was achieved in a mode stricken between bare metal plate electrodes by radio-frequency power supply at 13.56 MHz. The rotational temperature was determined by using the Boltzmann plot of the OH (A 2sigma+ --> X 2pi) radical and the variation tendency of the gas temperature versus the input power was obtained. Furthermore, the measurement of the sequences of vibrational bands of N2 second positive system (C 3 pi(u) --> B 3 pi(g)) is made and the vibrational temperature was determined correspondingly. The experiment results showed that the emission peaks of N2 (C3 pi(u)) reached the maximum at the nitrogen flow rate of 80 mL x min(-1) with increasing addition of nitrogen, the gas temperature increased from 342 to 523 K when the input power increased from 30 to 210 W, and the vibrational temperature changed slightly when the gas flow rate of nitrogen increased from 30 to 140 mL x min(-1).