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Regularized multiframe phase-shifting algorithm for three-dimensional profilometry.

Fuqin Deng1, Wui Fung Sze, Jiangwen Deng

  • 1Imaging Systems Laboratory, Department of Electrical and Electronic Engineering, University of Hong Kong, Pokfulam Road, Hong Kong 999077, China.

Applied Optics
|January 25, 2012
PubMed
Summary

This study introduces a new phase-shifting algorithm (PSA) for high-precision 3D measurements in industrial inspection. The R-PSA method improves accuracy in phase-measuring profilometry, verified by simulations and experiments.

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Area of Science:

  • Metrology and Measurement Science
  • Optical Engineering
  • Industrial Inspection Technologies

Background:

  • Industrial inspection systems frequently require high-precision three-dimensional (3D) measurements of objects.
  • Phase-measuring profilometry (PMP) is a widely adopted technique for achieving such 3D measurements.
  • Existing multiframe phase-shifting algorithms (PSAs) have limitations in accuracy and robustness.

Purpose of the Study:

  • To develop and evaluate novel phase-shifting algorithms (PSAs) for enhanced 3D measurement precision.
  • To introduce a regularization framework incorporating a novel smoothness constraint, termed the R-PSA method.
  • To demonstrate the efficacy of the R-PSA method through both simulated and experimental validation.

Main Methods:

  • Development of phase-shifting algorithms (PSAs) within a regularization framework.

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  • Introduction of a novel smoothness constraint to the regularization process.
  • An iterative procedure for obtaining the desired phase measure using the R-PSA method.

    • Main Results:

    • The proposed R-PSA method demonstrates improved performance in phase measurement compared to existing multiframe PSAs.
    • Simulation results confirm the effectiveness of the R-PSA algorithm in achieving higher accuracy.
    • Experimental validation corroborates the simulation findings, highlighting the practical applicability of the R-PSA method.

    Conclusions:

    • The R-PSA method, incorporating a novel smoothness constraint, offers a significant advancement in phase-measuring profilometry.
    • This iterative algorithm effectively enhances the precision of 3D measurements for industrial inspection applications.
    • The R-PSA method provides a robust and accurate solution for interferometric measurements, outperforming current techniques.