Search research articles

ABOUT JoVE

Overview Leadership Blog JoVE Help Center

AUTHORS

Publishing Process Editorial Board Scope & Policies Peer Review FAQ Submit

LIBRARIANS

Testimonials Subscriptions Access Resources Library Advisory Board FAQ

RESEARCH

JoVE Journal Methods Collections JoVE Encyclopedia of Experiments Archive

EDUCATION

JoVE Core JoVE Business JoVE Science Education JoVE Lab Manual Faculty Resource Center Faculty Site

Terms & Conditions of Use

Search research articles

Related Experiment Video

Updated: May 25, 2026

Micro-masonry for 3D Additive Micromanufacturing

Micro-masonry for 3D Additive Micromanufacturing

Published on: August 1, 2014

Fabrication of two-dimensional superposed microstructure by interference lithography.

Hao Lü¹, Qiu-Ling Zhao, Qing-Yue Zhang

¹Institute of Photonic Information Technology, School of Mathematics and Physics Department, Qingdao University of Science and Technology, Qingdao 266061, China.

|January 25, 2012

Summary

Single exposure interference lithography (IL) fabricates 2D superposed microstructures. This method successfully created a 2D superposed photonic crystal, matching computer simulations for advanced optical applications.

Related Concept Videos

You might also read

Related Articles

Articles linked to this work by shared authors, journal, and citation graph.

Sort by

Same author

Phenothiazine-Based Luminophores with AIE, Solvatochromism, and Mechanochromic Characteristics.

The journal of physical chemistry. B·2021

Same author

Predicting Response to Systemic Chemotherapy for Advanced Gastric Cancer Using Pre-Treatment Dual-Energy CT Radiomics: A Pilot Study.

Frontiers in oncology·2021

Same author

Hsa_circ_0011385 knockdown represses cell proliferation in hepatocellular carcinoma.

Cell death discovery·2021

Same author

Novel simulation of aqueous total nitrogen and phosphorus concentrations in Taihu Lake with machine learning.

Environmental research·2021

Same author

Improving the Efficiency of Organic Solar Cells by Introducing Perylene Diimide Derivative as Third Component and Individually Dissolving Donor/Acceptor.

ChemSusChem·2021

Same author

Selective synthesis of sulfoxides and sulfones <i>via</i> controllable oxidation of sulfides with <i>N</i>-fluorobenzenesulfonimide.

Organic & biomolecular chemistry·2021

Area of Science:

Optics and Photonics
Materials Science
Nanotechnology

Background:

Interference lithography (IL) is a key technique for fabricating periodic microstructures.
Creating complex two-dimensional (2D) superposed microstructures requires advanced fabrication methods.

Purpose of the Study:

To report the theory and method for single exposure IL to fabricate 2D superposed microstructures.
To demonstrate the fabrication of a 2D superposed photonic crystal using this technique.

Main Methods:

Discussed six-beam interference intensity distributions with varying azimuth angles.
Utilized computer simulations to obtain 2D superposed microstructures with different periodic constants.
Employed CHP-C positive photoresist for experimental fabrication.

More Related Videos

Creating Two-Dimensional Patterned Substrates for Protein and Cell Confinement

Creating Two-Dimensional Patterned Substrates for Protein and Cell Confinement

Published on: September 6, 2011

Atomically Traceable Nanostructure Fabrication

Atomically Traceable Nanostructure Fabrication

Published on: July 17, 2015

Related Experiment Videos

Last Updated: May 25, 2026

Micro-masonry for 3D Additive Micromanufacturing

Micro-masonry for 3D Additive Micromanufacturing

Published on: August 1, 2014

Creating Two-Dimensional Patterned Substrates for Protein and Cell Confinement

Creating Two-Dimensional Patterned Substrates for Protein and Cell Confinement

Published on: September 6, 2011

Atomically Traceable Nanostructure Fabrication

Atomically Traceable Nanostructure Fabrication

Published on: July 17, 2015

Main Results:

Achieved computer simulations of 2D superposed microstructures with controlled periodic constants.
Experimentally fabricated a 2D superposed photonic crystal with a hexagonal pattern of hexagonal lattice cells.
Demonstrated close agreement between experimental results and computer simulations.

Conclusions:

Single exposure interference lithography is a viable method for fabricating 2D superposed microstructures.
This technique facilitates the study of 2D photonic crystal fabrication, surface lasing, and optical waveguides.
The developed method offers a pathway for creating novel optical devices and materials.