Updated: May 25, 2026

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
Published on: August 8, 2025
G C Ballesteros1, J Matres, J Martí
1Universidad Politecnica de Valencia, Camino de Vera, Valencia, Spain. guibalga@ntc.upv.es
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We developed a new method to measure backscattering in silicon microring resonators. This technique accurately models resonator parameters and reveals how backscattering impacts resonance shapes.
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