Anti-drift and auto-alignment mechanism for an astigmatic atomic force microscope system based on a digital versatile

E-T Hwu1, H Illers, W-M Wang

  • 1Physikalisch-Technische Bundesanstalt (PTB), Braunschweig, Germany. whoand@phys.sinica.edu.tw

Summary

This study introduces an anti-drift and auto-alignment mechanism for astigmatic detection system (ADS)-based atomic force microscopy (AFM). The novel system significantly reduces signal drift, enabling precise measurements.