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High-precision Electromagnetic Flowmeter with Empty Pipe Detection via Complex Programmable Logic Device-based Waveform Recognition

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Algorithmic error correction of impedance measuring sensors.

Oleg Starostenko¹, Vicente Alarcon-Aquino, Wilmar Hernandez

¹Research Center CENTIA, Department of Computing, Electronics and Mechatronics, Universidad de las Américas, Puebla, 72820, México;

Sensors (Basel, Switzerland)

|February 4, 2012

Summary

This summary is machine-generated.

This study introduces new methods to improve the accuracy of low-cost impedance measurement devices without sacrificing speed. Algorithmic and iterative corrections linearize sensor functions, enhancing precision for applications like charge-coupled device manufacturing.

Keywords:

C-V G-V characteristic meter error correction impedance measuring sensor

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Area of Science:

Electrical Engineering
Measurement Science
Semiconductor Manufacturing

Background:

Low-cost impedance measuring devices often suffer from reduced accuracy or operational speed.
Accurate impedance measurements are critical for semiconductor manufacturing process control.
Existing methods may not adequately address linearization of sensor and converter transfer functions.

Purpose of the Study:

To present novel design concepts and advanced techniques for enhancing the accuracy of low-cost impedance measurement devices.
To achieve increased accuracy without compromising operational speed.
To validate proposed methods through practical implementation and testing.

Main Methods:

Algorithmic error correction for sensor linearization.
Iterative correction methods to linearize signal conditioning converters.
Development and implementation of a specialized C-V, G-V characteristic analysis system.

Main Results:

Demonstrated significant improvements in the accuracy of low-cost impedance measurement.
Successful linearization of transfer functions for sensors and converters was achieved.
The developed system effectively performed in-situ monitoring during charge-coupled device (CCD) manufacturing.

Conclusions:

The proposed algorithmic and iterative correction methods are effective for improving impedance measurement accuracy.
The developed measurement system is suitable for real-time process control in semiconductor fabrication.
The study defines the practical utility and performance range of the applied error correction techniques.