Hierarchical structural nanopore arrays fabricated by pre-patterning aluminum using nanosphere lithography

A highly ordered and hierarchical structural nanopore array is fabricated via anodizing a pre-patterned aluminum foil under an optimized voltage. A pre-patterned hexagonal nanoindentation array on an aluminum substrate is prepared via the nanosphere lithography method. This pattern leads to an elaborate nanochannel structure with seven nanopores in each nanoindentation after anodization treatment. The structure achieved in our study is new, interesting, and likely to be applied in photonic devices.