David Holec1, Richard Rachbauer, Li Chen
1Department of Physical Metallurgy and Materials Testing, Montanuniversität Leoben, Franz-Josef-Strasse 18, A-8700 Leoben, Austria.
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This study explores the phase stability of titanium, zirconium, and hafnium aluminum nitride (TM-Al-N) thin films. Researchers determined the specific aluminum content ranges for cubic and wurtzite structures, validating predictions with experimental data.
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