Diffusion-assisted high-resolution direct femtosecond laser writing.

Ioanna Sakellari1, Elmina Kabouraki, David Gray

  • 1IESL-FORTH , N. Plastira 100, 70013, Heraklion, Crete, Greece.

ACS Nano
|February 14, 2012
PubMed
Summary

We developed a novel method using quencher diffusion to enhance the resolution of direct femtosecond laser writing. This technique achieves sub-500 nm feature sizes in 3D polymer structures, rivaling state-of-the-art methods.