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Updated: May 24, 2026

Nanoscale Characterization of Liquid-Solid Interfaces by Coupling Cryo-Focused Ion Beam Milling with Scanning Electron Microscopy and Spectroscopy
Published on: July 14, 2022
Localized grounding, excavation, and dissection using in-situ probe techniques for focused ion beam and scanning
Jeffrey Ditto1, David Krinsley, Kurt Langworthy
1Department of Chemistry, University of Oregon, Eugene, OR 97403-1241, USA. ditto@uoregon.edu
Abstract:
While investigating rock varnish, we explored novel uses for an in-situ micromanipulator, including charge collection, sample manipulation, as well as digging and dissection at the micron level. Dual-beam focused ion beam microscopes (DB-FIB or FIBSEM) equipped with micromanipulators have proven to be valuable tools for material science, semiconductor research, and product failure analysis. Researchers in many other disciplines utilize the DB-FIB and micromanipulator for site-specific transmission electron microscope (TEM) foil preparation. We have demonstrated additional applications for in-situ micromanipulators.
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