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Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station

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In-plane illuminated metallic annular aperture array for sensing application.

Qing Tan¹, Matthieu Roussey, Armando Cosentino

¹Ecole Polytechnique Fédérale de Lausanne, Institute of Microengineering, Optics & Photonics Technology Laboratory, Neuchâtel, Switzerland. qing.tan@epfl.ch

|February 21, 2012

Summary

This summary is machine-generated.

We developed a novel annular aperture array (AAA) device for highly sensitive on-chip sensing. This reflective cavity shows near-perfect absorption and a sensitivity of 764 nm/RIU for refractive index sensing.

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Area of Science:

Optical metamaterials
Nanophotonics
Sensing technologies

Background:

Annular aperture arrays (AAAs) offer unique optical properties.
In-plane illumination of reflective nanostructures can lead to enhanced light-matter interactions.

Purpose of the Study:

To investigate the optical properties of reflective AAAs under in-plane illumination.
To explore the potential of AAAs for on-chip sensing applications.

Main Methods:

Theoretical investigation of optical properties.
Modeling of a reflective AAA cavity.
Analysis of waveguide mode resonance and field localization.

Main Results:

Achieved near-perfect absorption due to waveguide mode resonance.
Demonstrated strong field localization within the aperture.
Theoretically predicted a high sensitivity of 764 nm/RIU for refractive index sensing.

Conclusions:

Reflective AAAs exhibit excellent optical absorption properties.
The proposed AAA device is suitable for on-chip sensing applications.
High sensitivity achieved highlights the potential for advanced biosensing and chemical detection.