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Related Experiment Video

Updated: May 24, 2026

Characterization of Surface Modifications by White Light Interferometry: Applications in Ion Sputtering, Laser Ablation, and Tribology Experiments

Characterization of Surface Modifications by White Light Interferometry: Applications in Ion Sputtering, Laser Ablation, and Tribology Experiments

Published on: February 27, 2013

Improved white-light interferometry on rough surfaces by statistically independent speckle patterns.

Bernhard Wiesner¹, Ondrej Hybl, Gerd Häusler

¹Institute of Optics, Information and Photonics, University of Erlangen–Nuremberg, Staudtstrasse 7/B2, 91058 Erlangen, Germany.

|February 24, 2012

Summary

This study introduces a new white-light interferometry (WLI) method for rough surfaces. By analyzing sequential speckle patterns, it significantly reduces measurement uncertainty for accurate surface roughness analysis.

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Last Updated: May 24, 2026

Characterization of Surface Modifications by White Light Interferometry: Applications in Ion Sputtering, Laser Ablation, and Tribology Experiments

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Area of Science:

Optical Metrology
Surface Characterization
Interferometry

Background:

White-light interferometry (WLI) is crucial for surface profiling.
Measurement uncertainty in WLI is often limited by speckle pattern shifts and variations in speckle brightness.
Darker speckles introduce greater statistical error in height measurements.

Purpose of the Study:

To develop a novel method for significantly reducing measurement uncertainty in WLI for rough surfaces.
To improve the accuracy of height map generation and surface roughness measurements using WLI.

Main Methods:

Sequential switching of illumination direction to capture multiple independent speckle patterns.
Selection of the brightest speckles from each sequential pattern.
Calculation of an accurate height map based on the selected bright speckles.

Main Results:

The novel method significantly reduces measurement uncertainty in WLI.
Generated height maps exhibit no outliers, improving data quality.
Measured surface roughness values closely correlate with stylus profilometry measurements.

Conclusions:

The proposed WLI technique effectively mitigates errors caused by speckle variations.
This method provides a more robust and accurate approach to surface roughness characterization.
The technique offers improved performance for WLI applications on rough surfaces.