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Fabrication of Nano-engineered Transparent Conducting Oxides by Pulsed Laser Deposition
Published on: February 27, 2013
The importance of the energetic species in pulsed laser deposition for nanostructuring
A Castelo1, C N Afonso, E Pesce
1Laser Processing Group, Instituto de Optica, CSIC, Serrano 121, Madrid, Spain.
Abstract:
This work reports on the optical and structural properties of nanostructured films formed by Ag nano-objects embedded in amorphous aluminium oxide (a-Al(2)O(3)) prepared by alternate pulsed laser deposition (PLD). The aim is to understand the importance of the energetic species involved in the PLD process for nanostructuring, i.e. for organizing nanoparticles (NPs) in layers or for self-assembling them into nanocolumns (NCls), all oriented perpendicular to the substrate. In order to change the kinetic energy of the species arriving at the substrate, we use a background gas during the deposition of the embedding a-Al(2)O(3) host. It was produced either in vacuum or in a gas pressure (helium and argon) while the metal NPs were always produced in vacuum. The formation of NPs or NCls is easily identified through the features of the surface plasmon resonances (SPR) in the extinction spectra and confirmed by electron microscopy. The results show that both the layer organization and self-assembling of the metal are prevented when the host is produced in a gas pressure. This result is discussed in terms of the deceleration of species arriving at the substrate in gas that reduces the metal sputtering by host species (by ≈58%) as well as the density of the host material (by ≥19%). These reductions promote the formation of large voids along which the metal easily diffuses, thus preventing organization and self-organisation, as well as an enhancement of the amount of metal that is deposited.
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