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Area of Science:

  • Semiconductor Physics
  • Optoelectronics
  • Materials Science

Background:

  • Solar-blind ultraviolet (UV) detection is crucial for various applications, including flame detection and missile warning systems.
  • Existing UV detectors often require external filters to block visible light, adding complexity and reducing efficiency.
  • High-aluminum-content AlGaN-based materials are promising for solar-blind applications due to their wide bandgap.

Purpose of the Study:

  • To synthesize, fabricate, and test a 320x256 focal plane array (FPA) of solar-blind AlGaN-based detectors.
  • To achieve high external quantum efficiency (EQE) and demonstrate reliable solar-blind operation.
  • To integrate the FPA with a readout integrated circuit (ROIC) and evaluate its imaging performance.

Main Methods:

  • Utilized pulse atomic layer deposition for metalorganic chemical vapor deposition (MOCVD) growth of high-quality, crack-free AlGaN layers with high aluminum composition.
  • Hybridized the AlGaN FPA to a matching ISC 9809 ROIC for operation in a SE-IR camera system.
  • Developed an opaque masking technology to mitigate the visible light response of the ROIC, eliminating the need for external filtering.

Main Results:

  • Demonstrated solar-blind operation across the entire array, with peak detection at wavelengths ≤ 256 nm and a three-order-of-magnitude drop-off by ~285 nm.
  • Achieved an average peak responsivity of 75 mA/W at 254 nm, corresponding to an external quantum efficiency (EQE) of ~37%.
  • Investigated the uniformity and imaging properties of the fabricated FPA, confirming its suitability for practical applications.

Conclusions:

  • Successfully fabricated a high-performance 320x256 AlGaN-based solar-blind FPA in-house.
  • The developed opaque masking technology effectively enables solar- and visible-blind operation, simplifying system design.
  • The FPA exhibits promising characteristics for advanced UV imaging applications requiring high sensitivity and uniformity.