Improvement of efficiency and temperature control of induction heating vapor source on electron cyclotron resonance

T Takenaka1, R Kiriyama, M Muramatsu

  • 1Division of Electrical, Electronic and Information Engineering, Graduate School of Engineering, Osaka University 2-1 Yamada-oka, Suita-shi, Osaka 565-0871, Japan. takenaka@i-beam.jp