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Building Langmuir Probes and Emissive Probes for Plasma Potential Measurements in Low Pressure, Low Temperature Plasmas
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Analysis of H atoms in a negative ion source plasma with the non-equilibrium electron energy distribution function

S Koga1, T Shibata, R Terasaki

  • 1Graduate School of Science and Technology, Keio University, 3-14-1 Hiyoshi, Kohoku-ku, Yokohama 223-8522, Japan.

The Review of Scientific Instruments
|March 3, 2012
PubMed

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