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Experimental electron energy distribution function investigation at initial stage of electron cyclotron resonance

S V Golubev1, I V Izotov, D A Mansfeld

  • 1Institute of Applied Physics of Russian Academy of Sciences, 603950, 46 Ul'yanova St., N.Novgorod, Russian Federation.

The Review of Scientific Instruments
|March 3, 2012
PubMed

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