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Metal-Assisted Electrochemical Nanoimprinting of Porous and Solid Silicon Wafers
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Hollow target magnetron-sputter-type solid material ion source.

D Sasaki1, S Ieki, T Kasuya

  • 1Graduate School of Engineering, Doshisha University, Kyoto 610-0321, Japan.

The Review of Scientific Instruments
|March 3, 2012
PubMed
Summary
This summary is machine-generated.

A novel aluminum electrode in a radio frequency magnetron discharge produced a mixed ion beam. This method successfully generated aluminum and argon ions for potential applications.

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Area of Science:

  • Plasma Physics
  • Materials Science
  • Ion Source Technology

Background:

  • Radio frequency (RF) magnetron discharges are utilized in various plasma applications.
  • Sputtering of electrode materials is a key process in generating ion beams.
  • Aluminum (Al) is a candidate material for electrodes in plasma environments.

Purpose of the Study:

  • To investigate the feasibility of using a thin-walled aluminum hollow electrode in an RF magnetron discharge.
  • To characterize the ion beam produced by sputtering the aluminum electrode.
  • To determine the composition and current density of the extracted ion beam.

Main Methods:

  • A thin-walled aluminum hollow electrode was integrated into an RF magnetron ion source.
  • Plasma was generated and stabilized using argon (Ar) gas.
  • The sputtered aluminum ions and argon ions were extracted through a 3 mm diameter hole.
  • The total beam current and the proportion of Al(+) ions were measured.

Main Results:

  • The aluminum electrode was successfully sputtered by the argon plasma.
  • A mixed ion beam consisting of aluminum (Al(+)) and argon (Ar(+)) ions was produced.
  • The total extracted beam current reached 50 μA.
  • Al(+) ions constituted 30% of the total ion beam current.

Conclusions:

  • A thin-walled aluminum hollow electrode is suitable for use in RF magnetron discharges.
  • This method provides a viable route for generating mixed Al(+) and Ar(+) ion beams.
  • The sputtering process yields a significant fraction of aluminum ions in the extracted beam.