Immobilization of enzyme and antibody on ALD-HfO2-EIS structure by NH3 plasma treatment

I-Shun Wang1, Yi-Ting Lin, Chi-Hsien Huang

  • 1Department of Electronic Engineering, Chang Gung University, 259 Wen-Hwa 1st Road, Kwei-Shan, Tao-Yuan, 333, Taiwan. cslai@mail.cgu.edu.tw.