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Precise and rapid distance measurements by scatterometry.

Tetsuya Hoshino1, Toyohiko Yatagai, Masahide Itoh

  • 1Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennoudai, Tsukuba 305-8577, Japan. hoshino@gabor.bk.tsukuba.ac.jp

Optics Express
|March 16, 2012
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Summary
This summary is machine-generated.

Researchers can measure distances between similar columnar scatterers using Fourier transforms of diffraction intensity. This optical memory technique offers high density and simple fabrication, with precise distance measurements up to 0.8 wavelengths.

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Area of Science:

  • Optics and Photonics
  • Materials Science
  • Nanotechnology

Background:

  • Accurate measurement of scatterer distances is crucial for advanced optical devices.
  • Existing methods may lack the precision or fabrication simplicity required for high-density optical memory.

Purpose of the Study:

  • To develop a novel method for measuring distances between isolated scatterers.
  • To explore the potential of this technique for creating high-density optical memory.

Main Methods:

  • Utilizing a single Fourier transform of diffraction intensity to determine scatterer distances.
  • Employing rigorous coupled-wave analysis (RCWA) for diffraction intensity calculations.
  • Validating results with nonstandard finite-difference time-domain (FDTD) simulations and experimental data.

Main Results:

  • Distances between similar columnar scatterers accurately measured via Fourier transform.
  • Method allows selection of distances between similar shapes among mixed scatterer types.
  • Achieved measurement resolution of 0.8 wavelengths and precision of 0.01 wavelengths.

Conclusions:

  • The developed technique enables precise distance measurements of scatterers.
  • Potential application in novel optical memory with high density and simple fabrication.
  • Method is robust, verified by simulations and experiments.