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Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
Javier Contreras1, Luis Gomes, Sergej Filonovich
11CENIMAT/I3N, Departamento de Ciência dos Materiais, Faculdade de Ciências e Tecnologia, FCT, Universidade Nova de Lisboa, 2829-516 Caparica, Portugal.
This study analyzed a 3D scanning system using amorphous silicon position sensitive detectors (PSDs). The system achieved a minimum defect detection of 350 μm and established a relationship between scanning angle and image displacement.
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