Updated: May 24, 2026

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
Xiaohua Wang1, Qiang Fu, Feng Shen
1The Laboratory on Adaptive Optics, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, China. wxhua009@163.com
This study introduces a novel method for correcting laser array errors using a Shack-Hartmann sensor and deformable mirror. The technique effectively corrects piston and tilt errors, enabling arbitrary phasing for laser arrays.
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