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Related Experiment Video

Updated: May 24, 2026

The Generation of Higher-order Laguerre-Gauss Optical Beams for High-precision Interferometry

The Generation of Higher-order Laguerre-Gauss Optical Beams for High-precision Interferometry

Published on: August 12, 2013

Error analysis of a plane mirror interferometer based on geometric optical paths.

Shanzhi Tang¹, Zhao Wang, Lihong Zhong

¹School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an, Shaanxi, 710049, China.

|March 16, 2012

Summary

This study analyzes errors in plane mirror interferometers caused by misalignments and rotations. A new geometric optical path model improves accuracy by accounting for coupled disturbances in precision displacement measurements.

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Area of Science:

Optical Engineering
Metrology
Precision Measurement

Background:

Plane mirror interferometers are crucial for precision displacement measurement.
Existing methods struggle with disturbances like misalignments, rotations, and air fluctuations, limiting accuracy.
Traditional error analysis is insufficient for dynamic and coupled error sources.

Purpose of the Study:

To analyze displacement measurement errors in plane mirror interferometers caused by various disturbances.
To develop a new error model for enhanced accuracy.
To investigate the coupling effects between optical path adjustments and object rotation.

Main Methods:

Error analysis based on geometric optical paths.
Application of partial differentiation theory for error modeling.
Characterization of error behavior using the developed model.

Main Results:

A novel error model was established for plane mirror interferometers.
The model effectively analyzes errors arising from misalignments, rotations, and air refractive index fluctuations.
The model quantifies the impact of coupled disturbances on measurement accuracy.

Conclusions:

The developed geometric optical path model enhances the understanding and analysis of errors in precision displacement measurements.
This model offers a method to mitigate accuracy reduction caused by coupled optical path and rotary errors.
Improved accuracy in precision displacement measurements is achievable with this advanced error analysis.