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Updated: May 24, 2026

Fabrication and Testing of Microfluidic Optomechanical Oscillators
Published on: May 29, 2014
Numerical and experimental studies of coupling-induced phase shift in resonator and interferometric integrated optics
L Y M Tobing1, L Tjahjana, S Darmawan
1Nanophotonics Laboratory, School of Electrical & Electronic Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798, Singapore. ltobing@pmail.ntu.edu.sg
Abstract:
Coupling induced effects are higher order effects inherent in waveguide evanescent coupling that are known to spectrally distort optical performances of integrated optics devices formed by coupled resonators. We present both numerical and experimental studies of coupling-induced phase shift in various basic integrated optics devices. Rigorous finite difference time domain simulations and systematic experimental characterizations of different basic structures were conducted for more accurate parameter extraction, where it can be observed that coupling induced wave vector may change sign at the increasing gap separation. The devices characterized in this work were fabricated by CMOS-process 193 nm Deep UV (DUV) lithography in silicon-on-insulator (SOI) technology.
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