Spectroscopic ellipsometry studies on various zinc oxide films deposited by ion beam sputtering at room temperature

Various zinc oxide films were deposited by ion-beam sputter deposition (IBSD) under different oxygen partial pressures (P(O2)) at room temperature. The as-deposited ZnO films fabricated at P(O2)>1.0×10(-4) Torr had poly-crystalline structures to absorb water on the surface at ambient condition. Simultaneously, the film surfaces were covered and smoothed by the surface layers formed with the water, hydroxyl (OH(-)) groups, and ZnO materials investigated by X-ray photoelectron spectroscopy (XPS). When the compositions of the surface layers were used in a multilayer fitting model of spectroscopic ellipsometry, the actual optical refractive index of the ZnO film deposited at P(O2)=1.2×10(-4) Torr was found to be about 1.9618 at λ=550 nm.