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Development of flexure based 6-degrees of freedom parallel nano-positioning system with large displacement

Dongwoo Kang1, Daegab Gweon

  • 1Advanced Manufacturing Systems Research Division, Korea Institute of Machinery and Materials, 156 Gajeongbuk-Ro, Yuseong-Gu, Daejeon 305-343, Korea. dwkang@kimm.re.kr

The Review of Scientific Instruments
|April 3, 2012
PubMed

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