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Thin film measurement system for moving objects based on a laterally distributed linear variable filter spectrometer.

Patrik J Murr1, Benjamin R Wiesent, Florian Hirth

  • 1Institute for Measurement Systems and Sensor Technology, Technische Universität München, Germany. patrik-murr@mytum.de

The Review of Scientific Instruments
|April 3, 2012
PubMed
Summary
This summary is machine-generated.

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This study presents a novel method for measuring thin film thickness in real-time, even while materials are in motion. This innovation significantly reduces production downtime for quality control in industrial applications.

Area of Science:

  • Materials Science
  • Optical Engineering
  • Industrial Process Monitoring

Background:

  • Accurate measurement of thin film properties is crucial for various industrial applications, including optics and lubrication.
  • Current methods often require halting production lines to measure parameters, increasing overall process time.
  • Monitoring moving thin layers in real-time presents a significant challenge in manufacturing.

Purpose of the Study:

  • To develop a non-disruptive method for instantaneous measurement of thin film parameters.
  • To address the drawback of production downtime caused by traditional measurement techniques.
  • To demonstrate a novel application for real-time film thickness measurement.

Main Methods:

  • Utilizing a combination of a linear variable filter and a complementary metal-oxide-semiconductor (CMOS) sensor array.

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  • Implementing a specialized readout sequence to capture transmission spectra from moving targets.
  • Developing a system capable of measuring thin films in the range of several hundred nanometers.
  • Main Results:

    • Achieved real-time film thickness measurement of moving objects up to 4 m/s.
    • Demonstrated a measurement reproducibility of less than 2 nm.
    • Successfully applied a novel measurement principle to film thickness monitoring.

    Conclusions:

    • The developed system enables in-line, non-disruptive monitoring of thin film thickness.
    • This technology offers significant potential for improving efficiency in industrial manufacturing processes.
    • The combination of linear variable filters and CMOS sensors provides a powerful tool for dynamic optical measurements.