Related Experiment Video

Updated: May 23, 2026

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
09:46

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators

Published on: August 8, 2025

Control of material damping in high-Q membrane microresonators

P-L Yu1, T P Purdy, C A Regal

  • 1JILA, University of Colorado and National Institute of Standards and Technology, Boulder, Colorado 80309, USA.

Physical Review Letters
|April 3, 2012
PubMed

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