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Preparation of Large-area Vertical 2D Crystal Hetero-structures Through the Sulfurization of Transition Metal Films for Device Fabrication
Published on: November 28, 2017
Synthesis of large-area MoS2 atomic layers with chemical vapor deposition
Yi-Hsien Lee1, Xin-Quan Zhang, Wenjing Zhang
1Institute of Atomic and Molecular Sciences, Academia Sinica, Taipei, Taiwan.
Advanced Materials (Deerfield Beach, Fla.)
|April 3, 2012
Abstract:
Large-area MoS(2) atomic layers are synthesized on SiO(2) substrates by chemical vapor deposition using MoO(3) and S powders as the reactants. Optical, microscopic and electrical measurements suggest that the synthetic process leads to the growth of MoS(2) monolayer. The TEM images verify that the synthesized MoS(2) sheets are highly crystalline.
