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High-efficiency x-ray gratings with asymmetric-cut multilayers.

Saša Bajt¹, Henry N Chapman, Andrew Aquila

¹Photon Science, DESY, Hamburg, Germany. sasa.bajt@desy.de

Journal of the Optical Society of America. A, Optics, Image Science, and Vision

|April 5, 2012

Summary

Researchers developed advanced gratings for X-ray and extreme ultraviolet (EUV) light using precisely layered materials. These asymmetric-cut multilayer structures achieve high dispersion and efficiency, paving the way for new optical applications.

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Area of Science:

Optics
Materials Science
Nanotechnology

Background:

Developing efficient gratings for X-ray and extreme ultraviolet (EUV) applications is crucial for advanced spectroscopy and imaging.
Traditional gratings face limitations in resolution and efficiency in these high-energy regimes.

Purpose of the Study:

To fabricate and analyze novel, highly dispersive gratings for the X-ray and EUV spectral ranges.
To demonstrate the effectiveness of asymmetric-cut multilayer structures as blazed gratings.

Main Methods:

Fabrication of multilayer mirrors with over 2000 bilayers using magnetron sputtering.
Precision cutting and polishing of multilayer mirrors at specific angles (2.9° and 7.8°).
Analysis of diffracted wave angular dispersion and efficiency using dynamical diffraction theory.

Main Results:

Demonstrated near-perfect blazed grating performance in the EUV regime.
Achieved angular dispersion consistent with high line densities (7250 and 19,700 line pairs/mm).
Measured first-order diffraction efficiency exceeding 95% of uncut multilayer reflectivity at 13.2 nm.

Conclusions:

Asymmetric-cut multilayer structures are highly efficient and dispersive gratings for X-ray and EUV applications.
The demonstrated precision in layer deposition and structure fabrication enables angstrom-level control.
The developed formalism is applicable to both Laue and Bragg geometries, including multilayer Laue lenses and Bragg optics.