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Fabrication of Low Temperature Carbon Nanotube Vertical Interconnects Compatible with Semiconductor Technology
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Carbon-carbon contacts for robust nanoelectromechanical switches

Owen Loh1, Xiaoding Wei, John Sullivan

  • 1Dept. of Mechanical Engineering, Northwestern University, 2145 Sheridan Rd., Evanston, IL 60208-3111, USA.

Advanced Materials (Deerfield Beach, Fla.)
|April 11, 2012
PubMed

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