Related Experiment Video
Updated: May 23, 2026
Fabrication and Characterization of Superconducting Resonators
Published on: May 21, 2016
AlN/3C-SiC composite plate enabling high-frequency and high-Q micromechanical resonators
Chih-Ming Lin1, Yung-Yu Chen, Valery V Felmetsger
1Department of Mechanical Engineering, Berkeley Sensor and Actuator Center, University of California at Berkeley, 94720, USA. gimmylin@berkeley.edu
Abstract:
An AlN/3C-SiC composite layer enables the third-order quasi-symmetric (QS(3)) Lamb wave mode with a high quality factor (Q) characteristic and an ultra-high phase velocity up to 32395 ms(-1). A Lamb wave resonator utilizing the QS(3) mode exhibits a low motional impedance of 91 Ω and a high Q of 5510 at a series resonance frequency (f(s)) of 2.92 GHz, resulting in the highest f(s)·Q product of 1.61 × 10(13) Hz among the suspended piezoelectric thin film resonators reported to date.
