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Updated: May 22, 2026

A Silicon-tipped Fiber-optic Sensing Platform with High Resolution and Fast Response
Published on: January 7, 2019
ZrO2 thin-film-based sapphire fiber temperature sensor
Jiajun Wang1, Evan M Lally, Xiaoping Wang
1Center for Photonics Technology, The Bradley Department of Electrical and Computer Engineering, Virginia Polytechnic Institute & State University, Blacksburg, Virginia 24061, USA. wangjj@vt.edu
This study developed a novel high-temperature zirconium dioxide (ZrO2) thin-film sensor on sapphire fiber. The sensor demonstrates reliable performance up to 1200 °C, offering a new solution for extreme temperature measurements.
Area of Science:
- Materials Science
- Optical Engineering
- Sensor Technology
Background:
- High-temperature environments require robust sensors.
- Sapphire fibers offer excellent thermal stability.
- Zirconium dioxide (ZrO2) exhibits desirable properties for high-temperature applications.
Purpose of the Study:
- To fabricate and characterize a submicrometer-thick ZrO2 thin-film temperature sensor on a sapphire fiber.
- To evaluate the sensor's performance at extended temperature ranges.
- To assess the material compatibility between ZrO2 and sapphire at high temperatures.
Main Methods:
- Deposition of a submicrometer-thick ZrO2 film onto a C-plane sapphire fiber tip.
- Characterization of ZrO2 thin films on sapphire substrates using X-ray diffraction and atomic force microscopy.
- Testing and calibration of the fabricated sensor using low-coherence optical interferometry up to 1200 °C.
Main Results:
- Successful fabrication of a ZrO2 thin-film-based sapphire fiber temperature sensor.
- ZrO2 exhibits good thermal expansion compatibility and chemical inertness with sapphire up to 1800 °C.
- The sensor achieved a temperature resolution of 5.8 °C at 1200 °C when coupled with a USB4000 spectrometer.
Conclusions:
- The developed ZrO2 thin-film sapphire fiber sensor is suitable for high-temperature measurements.
- The sensor's performance is reliable within the tested temperature range (200 °C to 1000 °C calibration, 1200 °C testing).
- This technology offers a promising avenue for advanced temperature sensing in extreme environments.
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