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Updated: May 22, 2026

One-Step Approach to Fabricating Polydimethylsiloxane Microfluidic Channels of Different Geometric Sections by Sequential Wet Etching Processes
Published on: September 13, 2018
Non-polydimethylsiloxane devices for oxygen-free flow lithography.
Ki Wan Bong1, Jingjing Xu, Jong-Ho Kim
1Department of Chemical Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, USA.
Oxygen-free flow lithography enables new microparticle synthesis. This technique overcomes limitations of polydimethylsiloxane devices, expanding material compatibility and applications in areas like real-time analyte detection.
Area of Science:
- Materials Science
- Chemical Engineering
- Nanotechnology
Background:
- Flow lithography is a key particle synthesis method.
- Current methods rely on polydimethylsiloxane (PDMS) microchannels and oxygen permeation.
- PDMS dependence limits precursor material choices.
Purpose of the Study:
- To develop an oxygen-free flow lithography technique.
- To enable the synthesis of complex microparticles using diverse materials.
- To overcome the limitations of PDMS-based flow lithography devices.
Main Methods:
- Utilized inert fluid-lubrication layers for oxygen-free operation.
- Employed initiated chemical vapor deposition (iCVD) nano-adhesive bonding for device fabrication.
- Developed non-polydimethylsiloxane (non-PDMS) microfluidic devices.
Main Results:
- Successfully synthesized complex microparticles with sub-second residence times.
- Demonstrated on-the-fly alteration of particle height.
- Enabled synthesis using water-insoluble monomers, organic solvents, and hydrophobic entities like quantum dots and carbon nanotubes.
Conclusions:
- Oxygen-free flow lithography significantly expands microparticle synthesis capabilities.
- The new technique allows for the creation of advanced functional microparticles.
- Developed near-infrared barcoded particles for real-time, label-free analyte detection.
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