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Related Experiment Video

Updated: May 22, 2026

Fabricating Nanogaps by Nanoskiving
07:36

Fabricating Nanogaps by Nanoskiving

Published on: May 13, 2013

Tunable nanometer electrode gaps by MeV ion irradiation.

J-C Cheang-Wong, K Narumi, G M Schürmann

    Applied Physics Letters
    |May 3, 2012
    PubMed
    Summary
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    We used ion irradiation to deform amorphous metals, precisely closing nanoscale gaps for advanced electronics. This method enables atomic-scale precision in fabricating electrodes for single-molecule devices and sensors.

    Area of Science:

    • Materials Science
    • Nanotechnology
    • Physics

    Background:

    • Fabricating nanometer-sized gaps is crucial for advanced electronic devices.
    • Existing methods often lack the precision required for atomic-scale control.

    Purpose of the Study:

    • To develop a novel method for fabricating nanogaps using ion irradiation.
    • To achieve atomic-scale precision in gap size control for electrode fabrication.

    Main Methods:

    • Utilizing MeV ion irradiation (4.64 MeV O(2+)) to induce plastic deformation in amorphous materials like Pd(80)Si(20).
    • In situ monitoring of gap size evolution via field emission current-voltage (I-V) characteristics.
    • Employing feedback control based on I-V measurements for precise gap fabrication.

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    Fabricating Nanogaps by Nanoskiving
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    Published on: May 13, 2013

    Tuning Oxide Properties by Oxygen Vacancy Control During Growth and Annealing
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    Main Results:

    • Successfully closed sub-micrometer gaps in amorphous metal electrodes using ion irradiation.
    • Demonstrated Fowler-Nordheim tunneling behavior consistent with the fabricated gap sizes.
    • Achieved atomic-scale precision in gap size fabrication through feedback control.

    Conclusions:

    • MeV ion-irradiation-induced plastic deformation is a viable technique for nanogap electrode fabrication.
    • This method offers precise control over gap dimensions, enabling new device possibilities.
    • The approach is expected to facilitate the development of single-molecule devices and sensors.