Scanning Electron Microscopy
Overview of Microscopy Techniques
Overview of Electron Microscopy
Electron Microscope Tomography and Single-particle Reconstruction
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Updated: May 22, 2026

Picometer-Precision Atomic Position Tracking through Electron Microscopy
Published on: July 3, 2021
Changhai Ru1, Yong Zhang, Haibo Huang
1College of Automation, Harbin Engineering University, Harbin 150001, China. rchhai@gmail.com
This study introduces a new visual servoing framework for scanning electron microscopes (SEMs) that enhances nanomanipulation precision. The system achieves subpixel tracking accuracy, improving nanoscale interaction and measurement capabilities.
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